KLA SP1 TBI and DLS
We offer a variety of optics assemblies for the KLA-Tencor / KT Surfscan SP1 TBI and DLS. Production and assembly is done with highest quality standards at ABSee-Laser, Germany. A warranty on those assemblies is therefor self-evident.

If you need any other parts or custom made parts, please contact us at info@absee-laser.com
  • SP1-BSA-TBI 129 - SP1-BSA-TBI

    Beam splitter assembly (BSC Assy) for KLA SP1 TBI, compatible with KLA P/N 536091, BEAMSPLITTER ASSY,BF-DF,SP1-TBI.

    Datasheet : -
  • SP1-BSA-DLS 130 - SP1-BSA-DLS

    Beam splitter assembly (BSC Assy.) for KLA SP1 DLS, compatible with KLA P/N 0283214-000 FRU KIT,ASSY,BEAMSPLITTER,SP1-DLS also KLA P/N 0238712-000 and P/N 0018134-000 ASSY, BEAMSPLITTER,SP1-DLS.

    Datasheet : -
  • SP1-HWP 131 - SP1-HWP

    Illumination polarizer assembly (HWP Assy., Half wave plate assy.) for KLA SP1 TBI and DLS, compatible with KLA P/N 0103687-000 SP1+ ILLUMINATION POLARIZER ASSY.

    Datasheet : -
  • SP1-HWPQWP 132 - SP1-HWPQWP

    Half wave plate / quarter wave plate assembly (HWP/QWP Assy.) for KLA SP1 TBI and DLS, compatible with KLA P/N 0050753-000 QTR-HALF WAVE CHGR ASSY, SP1 TBI DLS

    Datasheet : -
  • SP1-ISO 133 - SP1-ISO

    Isolator for KLA SP1 TBI and DLS, compatible with KLA P/N 349437 ISOLATOR,OPTICAL,488NM,SP1. Part of Isolator assembly KLA P/N 509167 and 0351490-000 SP1 ISOLATOR ASSY. (Isolator with mouting bracket and base plate)

    Datasheet : -
  • SP1-ISO-HP 134 - SP1-ISO-HP

    High power isolator with enhanced lifetime compared to original part for KLA SP1 DLS, compatible with KLA P/N 349437 and 0351490-000 ISOLATOR,OPTICAL,488NM,SP1. Part of Isolator assembly KLA P/N 509167 SP1 ISOLATOR ASSY. (Isolator with mouting bracket and base plate)

    Datasheet : -
  • SP1-LA-DLS 145 - SP1-LA-DLS

    Laser head for KLA SP1 DLS, manufacturer JDSU, brand new (no refurbishment or re-gas), compatible with KLA P/N 0278424-000 LASER ASSY,ARGON,75mW,FSB,SP1-DLS or P/N 571024 LASER ASSY, SP1-DLS.

    Datasheet : -
  • SP1-LA-TBI 146 - SP1-LA-TBI

    Laser head for KLA SP1 TBI, manufacturer JDSU, brand new (no refurbishment or re-gas), compatible with KLA P/N 0105128-000 30mW ARGON LASER ASSY or 0224471-000 ASSY,LASER,ARGON,30MW,TESTED

    Datasheet : -
  • SP1-PMT 147 - SP1-PMT

    Photo multiplier tube for SP1, compatible with KLA P/N 0092493-001 PHOTOMULTIPLIER TUBE,SP1.

    Datasheet : -
  • SP1-LNT-DLS 148 - SP1-LNT-DLS

    Power supply for KLA SP1 DLS laser head, compatible with KLA P/N 0029941-001 PWR SUPPLY,LASER,75 MW,SP1-DLS

    Datasheet : -
  • SP1-LNT-TBI 149 - SP1-LNT-TBI

    Power supply for KLA SP1 TBI laser head, compatible with KLA P/N 168807 POWER SUPPLY 30MW for SP1-TBI.

    Datasheet : -
  • SP1-BPSP 150 - SP1-BPSP

    BPS pin (pin only!) for KLA SP1 TBI and DLS, compatible with KLA P/N 508250 BPS-Cal Pin SP1.

    Datasheet : -
  • SP1-ACP-DLS 151 - SP1-ACP-DLS

    Autocal pin (pin only!) for KLA SP1 DLS, compatible with KLA P/N 0060464-000 FRU,ASSY,ACAL-PIN,SP1-DLS/TQM.

    Datasheet : -
  • SP1-ACP-TBI 152 - SP1-ACP-TBI

    Autocal pin (pin only!) for KLA SP1 TBI, compatible with KLA P/N 0060463-000 FRU,ASSY,ACAL-PIN,SP1-TBI/TQM.

    Datasheet : -
  • 157 - SP1-SPF-LN

    Replacement lens in mount for spatial filter SP1 TBI and DLS normal path.

    Datasheet : -
  • 158 - SP1-SPF-LO

    Replacement lens in mount for spatial filter SP1 TBI and DLS oblique path.

    Datasheet : -
  • SP1-MPS-TBI 159 - SP1-MPS-TBI

    Main power supply in main power supply drawer, low voltages, for SP1 TBI, compatible with 0056119-000 PWR SUPPLY,MODULAR,650W,CONFIG.

    Datasheet : -
  • SP1-MPS-DLS 160 - SP1-MPS-DLS

    Main power supply in main power supply drawer, low voltages, for SP1 DLS, compatible with KLA P/N 0279265-000 FRU KIT,PWR SUPPLY,MODULAR,650W,CONFIG and KLA P/N 0056119-000 PWR SUPPLY,MODULAR,650W,CONFIG.

    Datasheet : -
  • SP1-MX 163 - SP1-MX

    X-axis motor for KLA SP1 TBI and DLS, compatible with KLA P/N 344389, STAGE X-AXIS MOTOR ASSEMBLY, SP1 und P/N 344192, MOTOR ASSY,TRANSL AXIS,SP1.

    Datasheet : -
  • SP1-TK 169 - SP1-TK

    Target toolkit for KLA SP1 TBI or DLS, includes 12 targets plus one piece SP1-TK-RMC (radiometrics clamp), comes in hard case, ready for cleanroom use.

    Datasheet : -
  • SP1-TK-RMC 170 - SP1-TK-RMC

    Special power sensor clamp mount for ratiometric measurement on a KLA SP1 TBI and DLS.

    Datasheet : -
  • SP1-TK-REM 171 - SP1-TK-REM

    Remote control for laser and laser power supply testing on a KLA SP1 TBI and DLS (set/display current and power).

    Datasheet : -
  • 172 - SP1-TK-PM1

    Single channel power meter kit including one single-channel power meter and one sensor, specially calibrated for KLA SP1 TBI or DLS.

    Datasheet : -
  • 173 - SP1-TK-PM2

    Dual channel power meter kit including one dual-channel power meter and two sensor, specially calibrated for KLA SP1 TBI or DLS, for easy adjustment of the autocal pin.

    Datasheet : -
  • SP1-LS 174 - SP1-LS

    Lead screw for the KLA SP1 TBI or DLS 12mm, compatible with KLA P/N 350567 SCREW,BALL,12MM DIA,2MM LEAD.

    Datasheet : -
  • SP1-BSA-DLS-HP 186 - SP1-BSA-DLS-HP

    High Power Beamsplitter Assembly (BSC Assy.) for KLA SP1 DLS with enhanced lifetime compared to original part for KLA SP1 DLS, compatible to KLA P/N 0283214-000 FRU KIT,ASSY,BEAMSPLITTER,SP1-DLS and KLA P/N 0238712-000 and P/N 0018134-000 ASSY, BEAMSPLITTER,SP1-DLS.

    Datasheet : -
  • SP1-MZ 189 - SP1-MZ

    Centering device z motor for KLA SP1 TBI and DLS, compatible with KLA P/N 341169, MOTOR ASSY,CD Z,SP1 (REV A and REV AB available).

    Datasheet : -
  • SP1-LSRSB 191 - SP1-LSRSB

    Lead screw rear support block, for KLA SP1, compatible with KLA P/N 349224 LEAD SCREW REAR SUPPORT BLOCK.

    Datasheet : -
  • SP1-LSFSB 192 - SP1-LSFSB

    Lead screw front support block, for KLA SP1, compatible with KLA P/N 350605, SUPPORT BALL SCR 10MM SHFT.

    Datasheet : -

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