KLA SP2
We offer a variety of optics assemblies for the KLA-Tencor / KT Surfscan SP2. Production and assembly is done with highest quality standards at ABSee-Laser, Germany. A warranty on those assemblies is therefor self-evident.
If you need any other parts or custom made parts, please contact us at
info@absee-laser.com
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135 - SP2-ATT
Attenuator assembly (attenuator assy.) for KLA SP2, compatible with KLA P/N 0253452-000 FRU, ATTENUATOR ASSY, HALF-WAVE, EC, SP2
Datasheet :
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136 - SP2-SMA
Servo mirror assembly (servo-mirror assy.) for KLA SP2, compatible with KLA P/N 00253311-000 ASSY, SERVO-MIRROR, SAPPHIRE, BSS, EC, SP2
Datasheet :
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137 - SP2-TMI
Turning mirror / fold mirror assembly for KLA SP2, compatible with KLA P/N 0255764-000 FRU, OLD FOLD MIRR, 90 DEG, SP2 or KLA P/N 0253457-000, FRU,FOLD MIRR,90 DEG,INCIDENT,EC,SP2
Datasheet :
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138 - SP2-HWP
Half-wave assembly (HWP assy.) for KLA SP2, compatible with KLA P/N 0253458-000 FRU,ROTATOR ASSY,HALF-WAVE,EC,SP2
Datasheet :
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139 - SP2-BSC
Beam splitter assembly (BSC assy.) for KLA SP2, compatible with KLA P/N 0253755-000 FRU, BSC ASSY, NRMLOBL CHNL, EC, SP2
Datasheet :
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140 - SP2-BPO
Beam pick-off set (2 pcs.) for quad-cells for KLA SP2 (also available seperatelly), compatible with KLA P/N 0253456-000 FRU, MIRROR, PICK-OFF, QC1, EC, SP2 and KLA P/N 0278802-000 FRU, MIRROR, PICK-OFF, QC2,EC,SP2
Datasheet :
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141 - SP2-HWPQWP
Half-wave quarter-wave changer assembly (HWP QWP assy.) for KLA SP2, compatible with KLA P/N 0253453-000 FRU, CHANGER ASSY, QTRHALF-WAVE, EC, SP2 or KLA P/N 0214553-001 FRU,Changer ASSY,QTR/Half-WAVE SP2
Datasheet :
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142 - SP2-SPF
Spatial filter assembly (L1 L2 spatial filter assy.) for KLA SP2, compatible with KLA P/N 0108009-002 L1 L2 SPATIAL FILTER ASSY. SP2
Datasheet :
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143 - SP2-CPS
Chamber pressure monitoring, measures and monitors the air pressure within the scan chamber, activates interlock when FFU is bad or dying, easy to install
Datasheet :
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144 - SP2-PMT
Photo multiplier tube for SP2, compatible with KLA P/N 0092493-001 PHOTOMULTIPLIER TUBE,SP1
Datasheet :
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154 - SP2-SFL1
L1A L1B Assembly of the spatial filters of the KLA SP2, compatible with KLA P/N 0259855-000 FRU,L1A,L1B, L1-L2 ASSY,EC,SP2
Datasheet :
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155 - SP2-TMN
Turning mirrors assembly (before spatial filter) for normal path, compatible with KLA P/N 0220037-001 SP2 Normal Channel M1/M2 Mirror
Datasheet :
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156 - SP2-DM
Dump mirror (repair kit) for BPS path, compatible with KLA P/N 0065817-001 MIRROR, DUMP, BPS,SP1-UV
Datasheet :
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161 - SP2-ACP
Autocal pin (pin only!) for KLA SP2, compatible with KLA P/N 0063021-005 AUTO-CAL ASSY, SP2.
Datasheet :
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162 - SP2-MPS
Main power supply 650W, low voltages, for SP2, part of main power supply drawer KLA P/N 0094103-001, FRU,DC MODULE ASSY,PDU,SP2
Datasheet :
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164 - SP2-MX
X-axis motor for KLA SP2, compatible with KLA P/N 0102491-000, MOTOR ASSY, BALL SCREW, X-STAGE, SP2.
Datasheet :
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165 - SP2-NIH
Normal isolator HWP of the KLA SP2, compatible with KLA P/N 0271477-000, FRU, HWP, NOR ISO, EC, SP2.
Datasheet :
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166 - SP2-NIQ
Normal isolator QWP of the KLA SP2, compatible with KLA P/N 0259856-000, FRU, QWP, NOR ISO, EC, SP2.
Datasheet :
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175 - SP2-LH
Vanguard Laser Head 350mW for KLA SP2, compatible with KLA P/N 0235019-000 Laser Head, UV, 355nm, 350mW, T sesam mo and KLA P/N 0113630-000 LASER HEAD, UV, 355MW, UNCOATED SESAM.
Datasheet :
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176 - SP2-PS
Spectra Physics J40 power supply with new laser diode, compatible with KLA P/N 0092416-001 POWER SUPPLY W/DIODE, UV LASER, J40 355MW.
Datasheet :
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177 - SP2-BPSNDF
BPS ND filter assembly for KLA SP2, compatible with KLA P/N 0214580-001.
Datasheet :
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178 - SP2-BPSB
Beam position sensor board for KLA SP2, compatible with KLA P/N 375403 PCB ASSY,BEAM POS SENS,SP1+.
Datasheet :
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179 - SP2-SHIM
Shim kit for KLA SP2, 11 shims, compatible with KLA P/N 0028186-000 KIT, SHIM, FLAT OPT, SP2.
Datasheet :
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180 - SP2-LS
Lead screw for KLA SP2, compatible with KLA P/N 0059176-000 SCREW,BALL,12MM DIA,2MM LEAD,SP1 UV.
Datasheet :
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181 - SP2-LSRSB
Lead screw rear support block, for KLA SP2, compatible with KLA P/N 349224 LEAD SCREW REAR SUPPORT BLOCK.
Datasheet :
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187 - SP2-MC
Centering device motor for KLA SP2, compatible with KLA P/N 0085136-002, MOTOR ASSY, CENTERING DEVICE, SP2.
Datasheet :
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188 - SP2-MZ
Z-axis motor for KLA SP2, compatible with KLA P/N 0145724-000, FRU,MOTOR/ENCODERASSY,Z-AXIS,SPINDLE,SP2.
Datasheet :
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190 - SP2-LSFSB
Lead screw front support block, for KLA SP2, compatible with KLA P/N 350605, SUPPORT BALL SCR 10MM SHFT.
Datasheet :
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Please note that style logos and trademarks such as "Spectra Physics", "Millennia", "3D-Systems", "SLA", "KLA", "Surfscan", "SP1", "SP2" etc. shown within this website are (typically) especially protected trademarks of the respective manufacturers.
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