KLA SP2
We offer a variety of optics assemblies for the KLA-Tencor / KT Surfscan SP2. Production and assembly is done with highest quality standards at ABSee-Laser, Germany. A warranty on those assemblies is therefor self-evident.

If you need any other parts or custom made parts, please contact us at info@absee-laser.com
  • SP2-ATT 135 - SP2-ATT

    Attenuator assembly (attenuator assy.) for KLA SP2, compatible with KLA P/N 0253452-000 FRU, ATTENUATOR ASSY, HALF-WAVE, EC, SP2

    Datasheet : -
  • SP2-SMA 136 - SP2-SMA

    Servo mirror assembly (servo-mirror assy.) for KLA SP2, compatible with KLA P/N 00253311-000 ASSY, SERVO-MIRROR, SAPPHIRE, BSS, EC, SP2

    Datasheet : -
  • SP2-TMI 137 - SP2-TMI

    Turning mirror / fold mirror assembly for KLA SP2, compatible with KLA P/N 0255764-000 FRU, OLD FOLD MIRR, 90 DEG, SP2 or KLA P/N 0253457-000, FRU,FOLD MIRR,90 DEG,INCIDENT,EC,SP2

    Datasheet : -
  • SP2-HWP 138 - SP2-HWP

    Half-wave assembly (HWP assy.) for KLA SP2, compatible with KLA P/N 0253458-000 FRU,ROTATOR ASSY,HALF-WAVE,EC,SP2

    Datasheet : -
  • SP2-BSC 139 - SP2-BSC

    Beam splitter assembly (BSC assy.) for KLA SP2, compatible with KLA P/N 0253755-000 FRU, BSC ASSY, NRMLOBL CHNL, EC, SP2

    Datasheet : -
  • SP2-BPO 140 - SP2-BPO

    Beam pick-off set (2 pcs.) for quad-cells for KLA SP2 (also available seperatelly), compatible with KLA P/N 0253456-000 FRU, MIRROR, PICK-OFF, QC1, EC, SP2 and KLA P/N 0278802-000 FRU, MIRROR, PICK-OFF, QC2,EC,SP2

    Datasheet : -
  • SP2-HWPQWP 141 - SP2-HWPQWP

    Half-wave quarter-wave changer assembly (HWP QWP assy.) for KLA SP2, compatible with KLA P/N 0253453-000 FRU, CHANGER ASSY, QTRHALF-WAVE, EC, SP2 or KLA P/N 0214553-001 FRU,Changer ASSY,QTR/Half-WAVE SP2

    Datasheet : -
  • SP2-SPF 142 - SP2-SPF

    Spatial filter assembly (L1 L2 spatial filter assy.) for KLA SP2, compatible with KLA P/N 0108009-002 L1 L2 SPATIAL FILTER ASSY. SP2

    Datasheet : -
  • SP2-CPS 143 - SP2-CPS

    Chamber pressure monitoring, measures and monitors the air pressure within the scan chamber, activates interlock when FFU is bad or dying, easy to install

    Datasheet : -
  • SP2-PMT 144 - SP2-PMT

    Photo multiplier tube for SP2, compatible with KLA P/N 0092493-001 PHOTOMULTIPLIER TUBE,SP1

    Datasheet : -
  • SP2-SFL1 154 - SP2-SFL1

    L1A L1B Assembly of the spatial filters of the KLA SP2, compatible with KLA P/N 0259855-000 FRU,L1A,L1B, L1-L2 ASSY,EC,SP2

    Datasheet : -
  • SP2-TMN 155 - SP2-TMN

    Turning mirrors assembly (before spatial filter) for normal path, compatible with KLA P/N 0220037-001 SP2 Normal Channel M1/M2 Mirror

    Datasheet : -
  • SP2-DM 156 - SP2-DM

    Dump mirror (repair kit) for BPS path, compatible with KLA P/N 0065817-001 MIRROR, DUMP, BPS,SP1-UV

    Datasheet : -
  • SP2-ACP 161 - SP2-ACP

    Autocal pin (pin only!) for KLA SP2, compatible with KLA P/N 0063021-005 AUTO-CAL ASSY, SP2.

    Datasheet : -
  • SP2-MPS 162 - SP2-MPS

    Main power supply 650W, low voltages, for SP2, part of main power supply drawer KLA P/N 0094103-001, FRU,DC MODULE ASSY,PDU,SP2

    Datasheet : -
  • SP2-MX 164 - SP2-MX

    X-axis motor for KLA SP2, compatible with KLA P/N 0102491-000, MOTOR ASSY, BALL SCREW, X-STAGE, SP2.

    Datasheet : -
  • SP2-NIH 165 - SP2-NIH

    Normal isolator HWP of the KLA SP2, compatible with KLA P/N 0271477-000, FRU, HWP, NOR ISO, EC, SP2.

    Datasheet : -
  • SP2-NIQ 166 - SP2-NIQ

    Normal isolator QWP of the KLA SP2, compatible with KLA P/N 0259856-000, FRU, QWP, NOR ISO, EC, SP2.

    Datasheet : -
  • SP2-LH 175 - SP2-LH

    Vanguard Laser Head 350mW for KLA SP2, compatible with KLA P/N 0235019-000 Laser Head, UV, 355nm, 350mW, T sesam mo and KLA P/N 0113630-000 LASER HEAD, UV, 355MW, UNCOATED SESAM.

    Datasheet : -
  • SP2-PS 176 - SP2-PS

    Spectra Physics J40 power supply with new laser diode, compatible with KLA P/N 0092416-001 POWER SUPPLY W/DIODE, UV LASER, J40 355MW.

    Datasheet : -
  • 177 - SP2-BPSNDF

    BPS ND filter assembly for KLA SP2, compatible with KLA P/N 0214580-001.

    Datasheet : -
  • SP2-BPSB 178 - SP2-BPSB

    Beam position sensor board for KLA SP2, compatible with KLA P/N 375403 PCB ASSY,BEAM POS SENS,SP1+.

    Datasheet : -
  • SP2-SHIM 179 - SP2-SHIM

    Shim kit for KLA SP2, 11 shims, compatible with KLA P/N 0028186-000 KIT, SHIM, FLAT OPT, SP2.

    Datasheet : -
  • SP2-LS 180 - SP2-LS

    Lead screw for KLA SP2, compatible with KLA P/N 0059176-000 SCREW,BALL,12MM DIA,2MM LEAD,SP1 UV.

    Datasheet : -
  • SP2-LSRSB 181 - SP2-LSRSB

    Lead screw rear support block, for KLA SP2, compatible with KLA P/N 349224 LEAD SCREW REAR SUPPORT BLOCK.

    Datasheet : -
  • SP2-MC 187 - SP2-MC

    Centering device motor for KLA SP2, compatible with KLA P/N 0085136-002, MOTOR ASSY, CENTERING DEVICE, SP2.

    Datasheet : -
  • SP2-MZ 188 - SP2-MZ

    Z-axis motor for KLA SP2, compatible with KLA P/N 0145724-000, FRU,MOTOR/ENCODERASSY,Z-AXIS,SPINDLE,SP2.

    Datasheet : -
  • SP2-LSFSB 190 - SP2-LSFSB

    Lead screw front support block, for KLA SP2, compatible with KLA P/N 350605, SUPPORT BALL SCR 10MM SHFT.

    Datasheet : -

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